一種注入增強(qiáng)型快速SOI-LIGBT新結(jié)構(gòu)研究
微電子學(xué)
頁(yè)數(shù): 5 2024-04-20
摘要: 薄頂層硅SOI(Silicon on Insulator)橫向絕緣柵雙極型晶體管(Lateral Insulated-Gate Bipolar Transistor, LIGBT)的正向飽和電壓較高,引入旨在減小關(guān)斷態(tài)拖尾電流的集電極短路結(jié)構(gòu)后,正向飽和電壓進(jìn)一步增大。提出了一種注入增強(qiáng)型(Injection Enhancement, IE)快速LIGBT新結(jié)構(gòu)器件(F-IE-...